Porous silicon bulk acoustic wave resonator with integrated transducer
نویسندگان
چکیده
: We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
منابع مشابه
Tunable coupled surface acoustic cavities
Related Articles Extremely low-loss acoustic phonons in a quartz bulk acoustic wave resonator at millikelvin temperature Appl. Phys. Lett. 100, 243504 (2012) Extraction of second order piezoelectric parameters in bulk acoustic wave resonators Appl. Phys. Lett. 100, 232901 (2012) Acoustic resonator based on periodically poled transducers: Concept and analysis J. Appl. Phys. 111, 064106 (2012) Vi...
متن کاملPrediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis
The strain sensitivity of the Aluminum Nitride (AlN)/Silicon (Si) surface acoustic wave resonator (SAWR) is predicted based on a modeling method introduced in this work, and further compared with experimental results. The strain influence on both the period of the inter-digital transducer (IDT) and the sound velocity is taken into consideration when modeling the strain response. From the modeli...
متن کاملScattering Matrix Method Applied to the Characterisation of Multilayered Porous Silicon Structures
We describe a numerical model initially aimed at simulating the propagation of acoustic surface waves in multilayered structures and show how it can be used to the prediction of the electric response of a non-focusing ultrasonic transducer. We also apply this model to non-destructive evaluation of the elastic properties of porous silicon.
متن کاملDesign and Analysis of a Rayleigh Saw Resonator for Gas Detecting Applications
Polymer coated gas-phase sensors using the classical Rayleigh-type surface acoustic wave (RSAW) mode showed higher sensitivity and larger dynamic range compared to bulk acoustic wave (BAW) sensors, being widely used in a variety of sensor systems for chemical and biological gas detection. Using Comsol Multiphysics software, we investigated a 2D finite element model of a Surface Acoustic Wave (S...
متن کاملFilm bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer
The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components. A new architecture is demonstrated which permits fabrication and integration of FBARs on arbitra...
متن کامل